
Au Gold Magnetron Sputtering Coating Machine On Silicon Wafers , Glass Slide , Ceramic Sheets
Au Gold Magnetron Sputtering on Silicon Wafers
Summary:
The gold sputtering layer features:
1. Binding layer is essential to enhance substrate and metal film adhesion. Royal Technology has developed a range of matured coating recipes based on different applications, support our customers with professional advice.
2. The roughness (RMS - root mean square) < 40Å is expected for most of the applications. For certain scanning probe applications a lower roughness might be required, generally 1.5 ~ 4 nm.
4. Gold sputtering layer surface purity: a clean surface is required for applications that employ gold surface modifications. Depending on the PVD process used, level of vacuum in the system, original purity of the gold source (over 99.99% generally)
Keywords: Au gold nano-structure thin film deposition, Gold thin film magnetron sputtering, PVD gold sputtering, Gold Vacuum Metallizing System
Applications:
Laboratory of Universities, R&D department of metal materials manufactures, PVD Vacuum Coating Service Centers, mostly used in electronics industry as conductive layer and the sciences for microscope specimens etc.
Technical Specifications:
MODEL | RTAC0808-SP |
TECHNOLOGY | DC Sputtering + Ion source (for option) |
MATERIAL | Stainless Steel (S304) |
CHAMBER SIZE | Φ800*H800mm |
CHAMBER TYPE | Cylinder, vertical, 1-door |
ROTARY RACK SYSTEM | Planetary/Central driving |
DEPOSITION MATERIAL | Gold, Aluminum, Silver, Copper, Chrome, Stainless Steel, Nickel, Titanium |
DEPOSITION SOURCE | Cylindrical / Planar Sputtering Cathodes: 2 or 3 for option.+ 3 Arc sources |
REACTIVE GAS CONTROL | MFC, 2/4 ways |
CONTROL | PLC(Programmable Logic Controller) + Touch Screen |
PUMP SYSTEM | SV300B - 1 set (Leybold) 300m³/hr |
Roots Pump - 1 set, 150L/S | |
Holding Pump - 1 set, 60m³/hr | |
Turbo Molecular Pump: - 1 set, 3500L/S | |
POWER SUPPLY | Bias power supply: 1*24 KW DC sputtering power: 2*24KW |
SAFETY SYSTEM | Numerous safety interlocks to protect operators and equipment |
COOLING | Recycle Cooling Water |
HEATING | Heaters, 9KW |
POWER ELECTRICAL | 480V/3 phases/60HZ ( USA compliant) |
460V/3 phases/50HZ ( Asia compliant) | |
380V/3 phases/50HZ ( EU-CE compliant) | |
FOOTPRINT | L3200*W2600*H2000mm |
TOTAL WEIGHT | 3.0 T |
CYCLE TIME | 30~40 minutes (depending on substrate material, substrate geometry and environmental conditions) |
POWER MAX.. | 50KW |
AVERAGE POWER CONSUMPTION (APPROX.) | 20KW |
PVD Gold Plating wafers
Please contact us for more specifications, Royal Technology is honored to provide you total coating solutions.
SHANGHAI ROYAL TECHNOLOGY INC.
Shanghai Royal Technology Inc. was established in 2006, a worldwide supplier of high quality vacuum equipment with key locations around the globe. Research and Development technology are supported by specialized engineers in the United States and China. High-tech machine manufacturing facilities are located in Shanghai and our global network of service centers ensure fast customer service response in key locations.
Shanghai Royal Technology has a strong drive for innovative design and high quality components selection, combined with an extra careful assembly process and a topnotch team of talented technicians and inventors, which enable us to offer turn-key coating solutions with high standard vacuum equipment, meeting and often exceeding Western standard. We are determined to serve the market worldwide in various industries such as:
Consumer electronics, automotive, renewable energy, architecture, Nano and bio-medical materials.
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RTSP1200-FCEV, It is a sputtering system with PECVD process to deposit thin film on hydrogen fuel cell power modules. Fuel Cell Vehicles is the newest technology for the next generation of environmentally friendly cars. The main advantage and technological progress compared to commonly used batteries like dry cell need to undergo a recurring recharging process, but hydrogen fuel cell power modules only require Hydrogen and Oxygen reaction to generate power for driving.
RTSP1200-DPC,This coating system is exclusively used for the DPC (Direct Plating Copper) ceramic substrates process. The DPC ceramic substrates are widely used in various applications: for instance in high brightness LED to increase the longevity because of its high heat radiation performance, Semiconductor equipment, in microwave wireless communication, military electronics, various sensor substrates, aerospace, railway transportation, electricity power and much more.
RT-CsI950, Evaporation coating plant is applied to CsI film deposition for X-Ray Imaging devices. It is an advanced technique to evaporate CsI on the screen to create high quality images. The high-resolution performance allows this application to be extremely efficient and disruptive in the medical instrument, nuclear energy industry, security checking and inspection, high energy physics subjects and more.
Shanghai Royal Technology also successfully designed and developed Cube and Cylinder model large size Aluminum Vacuum Metalizing System which is used for Automotive Logo Board Coating.
Live Locally, Think Globally is our Vision. We live our day to day business by the concept of “Integrity and Solidarity”, always striving for innovation to achieve win-win situations in our ecosystem of worldwide partners. As pioneers in the Vacuum Coating Equipment Industry, we never relied on previous accomplishments, but we continuously tried to explore the ever changing world of the Vacuum Coating Industry to always create optimal economic, social and environmental benefits for our customers.
ROYAL TECHNOLOGY'S CULTURE
ROYAL's Vision: to be the worldwide famous brand supplier of providing total solutions to customers requirement.
ROYAL' Mission: protects the environment, saves our blue planet ; to improve labors tough working environment, enhance work efficiency, completely help owners to reduce production cost.
ROYAL's Philosophy: human-oriented, honest, innovative and make the greatest contribution to society.
ROYAL's Value: innovation, advanced technology’s R&D, serving China and worldwide's manufacturing industries.
ROYAL's Service: ONE-STOP service, with excellent technology and products, professional dedication to serve our customers.